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Chemical-mechanical planarization
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#	Item
11	Reference List by Module[removed]Arizona Board of Regents for The University of Arizona Manufacturing Overview Add to Reading List Source URL: www.erc.arizona.edu Language: English - Date: 1999-12-02 13:42:10 Microtechnology Chemical-mechanical planarization Etching Polishing Semiconductor Solid Copper interconnect Semiconductor device fabrication Materials science Technology
12	A world-class innovation centre accelerating the commercialization of next-generation electronic products 1 Add to Reading List Source URL: www.c2mi.ca Language: English - Date: 2012-07-31 15:50:12 Technology Microelectromechanical systems Etching Metrology Wafer Electron microscope Chemical-mechanical planarization Stepper Semiconductor device fabrication Materials science Microtechnology
13	Applied Reflexion® LK Prime™ CMP System Enabling High-Volume Manufacturing of Advanced 3D Microchips July 7, 2014 Add to Reading List Source URL: www.appliedmaterials.com Language: English - Date: 2014-07-03 18:57:40 Multigate device Semiconductor device fabrication Chemical-mechanical planarization Wafer
14	T301-medea+ (lo1[removed]:41 Add to Reading List Source URL: www.catrene.org Language: English - Date: 2009-03-25 10:37:03 Chemistry Wafer Chemical vapor deposition Chemical-mechanical planarization Integrated circuit STMicroelectronics Semiconductor fabrication plant Semiconductor device fabrication Technology Materials science
15	PDF Document Add to Reading List Source URL: msu.euramet.org Language: English - Date: 2014-06-13 12:55:32 Materials science Three-dimensional integrated circuit Through-silicon via Wafer Chemical-mechanical planarization Integrated circuit Microelectromechanical systems Metrology Semiconductor device fabrication Technology Microtechnology
16	j431 Index a acoustic microscopy 406, 407 – bonded wafer thickness, measuring 417 Add to Reading List Source URL: www.wiley-vch.de Language: English - Date: 2014-03-31 21:03:45 Technology Three-dimensional integrated circuit Wafer backgrinding Wafer dicing Wafer Through-silicon via Microelectromechanical systems SUSS MicroTec Chemical-mechanical planarization Semiconductor device fabrication Microtechnology Electronics
17	SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory Add to Reading List Source URL: mems.sandia.gov Language: English - Date: 2013-04-09 15:47:51 Statistics Technology Surface micromachining Standard deviation Microelectromechanical systems Etching Polycrystalline silicon Resist Chemical-mechanical planarization Materials science Microtechnology Semiconductor device fabrication
18	SUMMiT V Five Level Surface Micromachining Technology Design Manual Version 3.2 – October 25, 2012 MEMS Technologies Department Microelectronics Development Laboratory Add to Reading List Source URL: www.mems.sandia.gov Language: English - Date: 2013-04-09 15:47:51 Statistics Technology Surface micromachining Standard deviation Microelectromechanical systems Etching Polycrystalline silicon Resist Chemical-mechanical planarization Materials science Microtechnology Semiconductor device fabrication
19	Article about the filling of Blind Microvias by Dr. Michael Dietterle, Dr.-Ing. Max Schlötter GmbH & Co. KG We fill the gaps ! New copper electrolyte for blind microvia filling Miniaturisation is still the determining Add to Reading List Source URL: www.schloetter.de Language: English - Date: 2011-05-27 10:45:06 Technology Printed circuit board Plating Via Electroplating Copper 100 micrometres Chemical-mechanical planarization 10 micrometres Electronics manufacturing Chemistry Manufacturing
20	SIMTech Technical Report (PT[removed]JT) Chemical Mechanical Planarization Add to Reading List Source URL: maltiel-consulting.com Language: English - Date: 2013-04-20 18:07:00 Technology Chemical-mechanical planarization Copper interconnect Microelectromechanical systems Etching Surface finishing Surface micromachining Shallow trench isolation Photolithography Semiconductor device fabrication Materials science Microtechnology

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